Anelva PVD Process Module

Item Specifications & Details
Manufacturer / Make Anelva
Indexed Keywords
Item Description & Seller Notes
Anelva PVD Process Module, w/ 4ea sputtering cathode sources; CTI-Cryogenics On-Board 10F cryopump, p/n 81164-08G-002R. Includes: control cabinet w/ 1ea Granville-Phillips 370 Stabil-Ion controller, 1ea MKS Type 670 signal conditioner, 1ea VAT PM-5 adaptive pressure controller, 2ea TDK-Lambda Genesys 150-10 DC power supplies, 2ea Advanced Energy Pinnacle pulsed-DC power supplies, mfr# 3152428-112E, 2ea Advanced Energy MDX-500 DC sputtering power supplies; accessory crate w/ 1ea Advanced Energy Sparc-le V arc suppression unit, mfr# 3152330-203K, cables; also includes 2ea plastic crates of shielding kits, as pictured. Chamber shipping dimensions: 48in x 72in x 74in, 3000 lbs; cabinet shipping dimensions: 46in x 48in x 82in, 1000 lbs; accessory crate shipping dimensions: 47in x 45in x 29in. [LOC: surplus staging]
Location & Pickup Information
Asset Location 1280 Disc Dr
Shakopee, MN 55379-1863
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