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Surface Technology Systems M/PLEX Multiplex ICP Etcher

Surface Technology Systems M/PLEX Multiplex ICP Etcher Surface Technology System M/PLEX Multiplex Government Surplus Auction - Primary Photo
Surface Technology Systems M/PLEX Multiplex ICP Etcher Surface Technology System M/PLEX Multiplex Government Surplus Auction - Photo #1 Surface Technology Systems M/PLEX Multiplex ICP Etcher Surface Technology System M/PLEX Multiplex Government Surplus Auction - Photo #2 Surface Technology Systems M/PLEX Multiplex ICP Etcher Surface Technology System M/PLEX Multiplex Government Surplus Auction - Photo #3 Surface Technology Systems M/PLEX Multiplex ICP Etcher Surface Technology System M/PLEX Multiplex Government Surplus Auction - Photo #4 Surface Technology Systems M/PLEX Multiplex ICP Etcher Surface Technology System M/PLEX Multiplex Government Surplus Auction - Photo #5 Surface Technology Systems M/PLEX Multiplex ICP Etcher Surface Technology System M/PLEX Multiplex Government Surplus Auction - Photo #6
Item Specifications & Details
Manufacturer / Make Surface Technology System
Model M/PLEX Multiplex
Year2001
Fuel Type Gasoline
VIN / Serial Number29443
Indexed Keywords
Item Description & Seller Notes
Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates. Serial no. 29443. Mfg 2001.
Location & Pickup Information
Asset Location 80 Rose Orchard Way
San Jose, CA 95134-1356
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